Radiation‐induced sample modification in surface analysis: InP as an extreme example

Spectacular topographical effects on InP resulting from ion and electron irradiation, both separately and simultaneously, at conditions common for surface analysis, are used as an example of drastic sample modification. Previously published observations (which include ion irradiation‐induced on‐surface growth of crystalline ‘stubs’ of InP as well as a strong synergetic response to simultaneous irradiation by ions and electrons) are summarized and the ‘microregion’ model proposed for interpretation of the ion‐induced effects is updated and underpinned by additional evidence. This model suggests that mass transport is initiated and proceeds in subsurface regions rather than on the surface (as has been proposed for impurity‐seeded cone growth). Possible explanations are put forward for the synergetic effect of simultaneous ion and electron irradiation. Various cases of synergetic binary interaction are pointed out.