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October 1, 1972IEEE Transactions on Electron Devices

A feedback method for investigating carrier distributions in semiconductors

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Authors

GMG. L. MillerAT&T (United States)

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Overview

Methodological study demonstrates a feedback-controlled profiling technique for semiconductor carrier distributions, indicating enhanced capability for remote and in situ device characterization.

Key Points

  • Develop and implement a feedback-loop-based capacitance-voltage technique to accurately profile carrier and doping distributions in reverse-biased semiconductor p-n junctions.
  • Implemented a feedback loop to provide controlled motion of the depletion layer's low-field boundary in reverse-biased p-n junctions.
  • Applied constant amplitude modulation to either depletion layer width or electric field to measure carrier density or its reciprocal, respectively.
  • Configured the apparatus to operate over long coaxial cables to evaluate feasibility for remote and in situ testing environments.
  • Achieved direct measurement of carrier density and its reciprocal via stabilized depletion layer boundary modulation without standard point-by-point manual voltage stepping.
  • Enabled sample placement at the end of arbitrary-length coaxial cables, successfully supporting on-line profiling during accelerator ion implantations and temperature-dependent device profiling in cryostats.

Cite This Study

G. L. Miller (1972) studied this question.

synapsesocial.com/papers/6a6fbe708031ec7bb1dbecb5https://doi.org/10.1109/t-ed.1972.17557
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