Functional Perovskites by Atomic Layer Deposition – An Overview

The last 20 years have seen a massive increase in reports on complex oxides with functional properties synthesized by atomic layer deposition (ALD). Many of these compounds have perovskite or perovskite‐related structures, and exhibit a range of electric and magnetic properties. This short review summarizes the current status of functional perovskites and ABO 3 compounds down to the ilmenite structure prepared by ALD, focusing on ferromagnetism and ferro‐ and piezoelectricity. All perovskite‐related compounds known to have been deposited by ALD down to the ilmenite structure are listed, with a summary of expected and measured functional properties. The origin of the functionality and possible applications are discussed, in addition to the deposition conditions and post‐treatment where necessary. Some future perspectives and suggestions for further work conclude the paper.