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May 1, 1994Journal of The Electrochemical Society

Ulfrathin Tantalum Oxide Capacitor Process Using Oxygen‐Plasma Annealing

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Authors

SKSatoshi KamiyamaMeijo UniversityHSHiroshi SuzukiYamagata UniversityHWHirohito WatanabeHiroshima University

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Cite This Study

Kamiyama et al. (1994) studied this question.

synapsesocial.com/papers/6a6fcb5326770c2b8de02be0https://doi.org/10.1149/1.2054904
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