A new technique for the deposition of the crystallized Ta2O5 thin films is described. Crystallized Ta2O5 thin films have been deposited on fused quartz substrates by reactive dc-diode sputtering. Crystalline structure and piezoelectric properties of the Ta2O5 thin film were investigated. Surface acoustic-wave properties, including a phase velocity, coupling coefficient, temperature coefficient of delay, and propagation loss, were measured.
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Nakagawa et al. (1987) studied this question.
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