During the past few years, there has been an increasing demand in the field of precision engineering for fine motion in multi-degrees of freedom systems. These applications motivated the development of a new robotics field called microrobotics. In this paper, we review both the design guidelines for microrobots and the advantages of using parallel robots in very high precision applications. Parallel micromanipulators using elastic joints as well as structures manufactured in single solid and metallic bellows are introduced.
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Pernette et al. (1997) studied this question.
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