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Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation Li-Peng Wang, Dong S. Shim, Qing Ma, Valluri R. Rao, Eyal Ginsburg, Alexander Talalyevsky; Characterization of polycrystalline AlN films using variable-angle spectroscopic ellipsometry. Journal of Vacuum Science & Technology A 1 July 2005; 23 (4): 1284–1289. https://doi.org/10.1116/1.1875192 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAVS: Science & Technology of Materials Interfaces and ProcessingJournal of Vacuum Science & Technology A Search Advanced Search |Citation Search
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Wang et al. (2005) studied this question.
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