Quantitative values for the strain and damage distributions in ion-implanted layers are obtained by the application of a kinematical model of x-ray diffraction. Distributions are synthesized by matching experimental and theoretical rocking curves. The method is applicable to ion-implanted, diffused, or as-grown multilayer thin structures.
No takes yet. Share an insight, caveat, or question.
Speriosu et al. (1979) studied this question.
Synapse has enriched 2 closely related papers on similar clinical questions. Consider them for comparative context: