An Active Micro Vibration Isolator with Zero-Power Controlled Magnetic Suspension Technology

In this paper, a three-degree-of-freedom vibration isolation system using active zero-power controlled magnetic suspension is presented in order to isolate vibrations transmitted from the ground and to attenuate the effect of direct disturbances on the table. The zero-compliance of the isolator for direct disturbances was realized by connecting a conventional mechanical spring in series with a negative spring produced by an active magnetic suspension mechanism. In this work, each degree-of-freedom-of-motion of the vibration isolator is treated analytically and it is shown that the developed system is capable to generate infinite stiffness in each mode. Experimental studies have been conducted as well to measure the effectiveness of the isolator under both types of disturbances. Further improvements for the developed system as well as the control techniques are also discussed.