SrTiO 3 -based metal–insulator–semiconductor heterostructures

We explored the feasibility of employing strontium titanate (SrTiO3) as semiconducting material in field-effect metal–insulator–semiconductor epitaxial heterostructures. This idea was suggested by the observation of a dramatic effect of the oxygen deficiency on SrTiO3−δ transport properties, which brings about metallic behavior with low-temperature mobility values comparable with those commonly found for silicon. By pulsed-laser deposition, we realized patterned field-effect devices, showing a resistance enhancement up to 90%. This promising result could open perspectives for crystalline-oxide electronics.