We have developed a 3.2 kHz, 14-bit optical absolute rotary encoder system using a profile sensor and a slit disc. The profile sensor, which we have designed for this purpose, is a unique CMOS area image sensor aimed at high-speed position detection ofXandYaxes.Yaxis profile data from the profile sensor is used for recognition of an index code on the slit disc, andXaxis profile data is used for position detection of the index code. This combination of two-axis information enables high resolution even with a small number of index codes (64 indexes) and a small amount of digital calculations. Experimental results show that this system can detect rotation with an angular resolution of 14 bits (0.022deg) and a maximum detection speed of 3.2 kHz.
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Sugiyama et al. (2008) studied this question.
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