Hybrid integration onto silicon motherboards with planar silica waveguides

Silicon micromachining can be used in conjunction with silica on silicon waveguide technology to fabricate hybrid optical motherboards. These motherboards comprise optical and electrical interconnects, alignment features for integration of optoelectronic components and electronic circuitry. The development of the principal building blocks of an optical motherboard, and the fabrication of a hybrid integrated optical transceiver, are described.