Methodology for Accurate Oxygen Distribution Analysis and Its Application to YBa₂Cu₃Ox Thin Films Using ¹⁶O(α, α)¹⁶O 3.045 MeV Resonance Reaction

The enhancement factor of oxygen of 16 O(α, α) 16 O resonance for a Rutherford backscattering cross section has been investigated using SiO 2 films of various thicknesses. A new procedure to accurately extract the resonant oxygen height from a raw spectrum has been proposed. With this procedure, the dependence between the film thicknesses and resonant signals has been investigated, and was found to agree well with a computer simulation within experimental error. Using the enhancement factor, the depth dependence of oxygen concentration in the YBa 2 Cu 3 O x /MgO systems has been estimated accurately. Estimations of the accuracy of elastic backscattering analysis are also given.