The authors demonstrated a microfabricated tuning fork temperature/infrared sensor with noise equivalent temperature difference (NETD) of 0.5mK at 20°C and with a thermal limited noise level of 5μ°C. The sensor raw material can cost less than 10 cents each and has a time constant of approximately 50ms. The sensitivity of infrared signal can potentially be further improved and optimized by selecting polymer materials with a proper thermal response.
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Tsow et al. (2007) studied this question.
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