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July 15, 2009Plasma Sources Science and Technology

Different modes of electron heating in dual-frequency capacitively coupled radio frequency discharges

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Authors

JSJulian SchulzeZDZoltán DonkóDLD Luggenhölscher

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Schulze et al. (2009) studied this question.

synapsesocial.com/papers/6a7096225671bbf00bc2bb06https://doi.org/10.1088/0963-0252/18/3/034011
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