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February 1, 1992Physical Review A

Modeling and diagnostics of the structure of rf glow discharges in Ar at 13.56 MHz

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TMToshiaki MakabeKeio UniversityNNNobuhiko NakanoHiroshima UniversityYYYukio YamaguchiJapan Chemical Industry Association

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Makabe et al. (1992) studied this question.

synapsesocial.com/papers/6a7096245671bbf00bc2bb1ahttps://doi.org/10.1103/physreva.45.2520
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