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June 14, 1986Journal of Physics D Applied Physics

Boltzmann equation analysis of electron swarm behaviour in monosilane

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Authors

YOY OhmoriSapporo UniversityMSM. ShimozumaHokkaido University of ScienceHTHiroaki TagashiraTokyo University of Science

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Ohmori et al. (1986) studied this question.

synapsesocial.com/papers/6a70969af44fa9f079de4165https://doi.org/10.1088/0022-3727/19/6/017
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