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August 1, 1975Journal of The Electrochemical Society

Kinetics of Decomposition of Silane (Diluted in Argon) in a Low Pressure Glow Discharge

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GNG. NoletUCLouvain

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G. Nolet (1975) studied this question.

synapsesocial.com/papers/6a89334e4c30e1095aec60adhttps://doi.org/10.1149/1.2134390
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