The second harmonics in both voltage and current waveforms are measured for RF Ar discharges in an asymmetry parallel-plate-type reactor. These values greatly depend on the matching network impedance at the second harmonic frequency. We mainly measure the second harmonic voltage and current under a small second harmonic current. The second harmonic voltage is calculated based on an equivalent circuit model of the discharge with nonlinear components. Although the sheath voltage distortion due to the sheath dynamics in the nonuniform ion density distribution is a main source of the second harmonic component, the power loss through inelastic collisions, which depends on the RF phase, is also important.
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Kawata et al. (1994) studied this question.
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