The mechanical properties of the diamondlike coatings deposited with mass-separated C+, CH+3, CH+4, and C2H+2 ion beams have been compared. The hardness, abrasive wear resistance, and adhesion of the coatings prepared with the C+ ion beam were superior to those of the coatings prepared with other ions. The most serious drawback of the films prepared with hydrocarbon beams was their brittleness and weak adhesion.
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Anttila et al. (1987) studied this question.
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