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May 14, 1980Journal of Physics D Applied Physics

Emission spectroscopy of SiH in a silane glow-discharge

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JPJ. PerrinCentre National de la Recherche ScientifiqueEDE DelafosseÉcole Polytechnique

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Perrin et al. (1980) studied this question.

synapsesocial.com/papers/6a709c796c240de38cdbdee8https://doi.org/10.1088/0022-3727/13/5/009
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