The Dammann grating is one kind of useful binary optical elements. We fabricated a single-layer birefringence-free 5×5 Dammann grating in silica glass using the filamentation of 800 nm femtosecond laser pulses. The diffraction efficiency of the Dammann grating reached 56%, which is close to the theoretical value of 77%.
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Li et al. (2005) studied this question.
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