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A higher goal: An on-wafer crystallization process to prepare pure silica zeolite (PSZ) MEL-type films that is superior to the previously used hydrothermal process is reported. These striation-free MEL-type films (right, see picture) outperform the traditional spin-on films (left) in terms of the kappa value, mechanical properties, surface roughness, mesopore size, and size distribution.
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Liu et al. (2009) studied this question.
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