Fourier-transform spectral interferometry for in situ group delay dispersion monitoring of thin film coating processes

This is the authors' abstract. We don't add key points for this paper.

A fast Fourier-based measurement system to determine phase, group delay, and group delay dispersion during optical coating processes is proposed. The in situ method is based on a Michelson interferometer with a broad band light source and a very fast spectrometer. To our knowledge, group delay dispersion measurements directly on the moving substrates during a deposition process for complex interference coatings have been demonstrated for the first time. Especially for the very precise production of chirped mirrors it is advantageous to get information about the phase properties of the grown layer stack to react on errors and retrieve more information about the coating process.