Deep-level transient spectroscopy system using a spectrum analyzer

In order to measure the thermal emission rate of a trap in semiconductor material without scanning the temperature, a new method, which utilizes a spectrum analyzer, has been developed. The theory on which our measuements depend is based on the relation between the time constant of a pure exponential wave and the relative amplitudes of its Fourier Components. The time constant is given by ts = (t/2r)[(10c−1)/(m2−10cn2)]1/2, where c = (Xn−xm/10, t is the period of the exponential wave, and xn and xm are the amplitudes of the nth and mth harmonics in dB, respectively.