Detecting Both Physical and (Bio‐)Chemical Parameters by Means of ISFET Devices

A multi‐parameter sensor system for the detection of eight (bio‐)chemical and physical parameters (pH, potassium concentration, penicillin concentration, diffusion coefficient of H + ‐ and OH – ‐ions, temperature, flow velocity, flow direction and liquid level) is realized by using the same transducer principle. A Ta 2 O 5 ‐gate ISFET (ion‐sensitive field‐effect transistor) is applied as basic transducer for all kinds of sensors. The multi‐parameter detection is achieved by means of sequentially or simultaneously scheduling of the hybride sensor modules consisting of four ISFET structures and an ion generator in different sensor arrangements and/or different operation modes. Thus, more parameters (eight) can be detected than the number of sensors (four) in the system.