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March 1, 1986Journal of Applied Physics

Oxidation temperature dependence of the dc electrical conduction characteristics and dielectric strength of thin Ta2O5 films on silicon

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GOG. S. OehrleinUniversity of Maryland, College Park

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G. S. Oehrlein (1986) studied this question.

synapsesocial.com/papers/6a895243991508d05dc97de3https://doi.org/10.1063/1.336468
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