Evidence of absence of electrode-limited conduction in thin (≳140 Å) Ta2O5 films

We report room-temperature high-field (E≳106 V/cm) electrical conduction measurements in ’’flaw-free’’ thin Ta2O5 films (140–2400 Å), with gold and aluminum counterelectrodes. The experimental results rule out electrode-limited conduction even though dlogi/dV1/2 corresponds to the Schottky process.