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November 1, 1983Journal of Applied Physics

Electrical properties of amorphous tantalum pentoxide thin films on silicon

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Authors

GOG. S. OehrleinUniversity of Maryland, College ParkARArnold ReismanCleveland State University

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Oehrlein et al. (1983) studied this question.

synapsesocial.com/papers/6a895243991508d05dc97de5https://doi.org/10.1063/1.331880
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