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May 15, 1984Journal of Applied Physics

Some properties of crystallized tantalum pentoxide thin films on silicon

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Authors

GOG. S. OehrleinUniversity of Maryland, College ParkFDF. M. d’HeurleUniversity of North Carolina at Chapel HillARArnold ReismanCleveland State University

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Oehrlein et al. (1984) studied this question.

synapsesocial.com/papers/6a70123226a7f98052dc960dhttps://doi.org/10.1063/1.332924
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