In-depth micro-Raman profiling of He+-implanted LiNbO 3 has been performed. It is demonstrated that in the buried nuclear stopping layer a transition from point to extended defects occurs at threshold dose in the range 1 − 2 × 10 15 ions/cm 2 related to polarization nano-clusters formation.
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Kostritski et al. (2006) studied this question.
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