Nanoimprint templates were fabricated from diamondlike carbon (DLC) films grown on Si, using negative-tone e-beam lithography and oxygen plasma etching. An antiadhesion coating was provided through fluorocarbon-based plasma treatment, which was found to form a Teflon-like thin layer on the treated DLC surface. The fluorinated templates were used to imprint arrays of dots with diameters down to 10nm in polymethyl-methacrylate. Application of the fluorocarbon plasma treatment was also demonstrated in the antiadhesion treatment of the nanoimprint resist and in elastomer molding.
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Schvartzman et al. (2008) studied this question.
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