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November 20, 1995Applied Physics Letters

Imprint of sub-25 nm vias and trenches in polymers

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Authors

SCStephen Y. ChouPrinceton UniversityPKPeter R. KraussTechnical University of DarmstadtPRPreston J. RenstromUniversity of Minnesota

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Chou et al. (1995) studied this question.

synapsesocial.com/papers/69d7dd31a2a48916bbbee2f3https://doi.org/10.1063/1.114851
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