The ranges of 5-80 keV deuterium ions in gold and aluminium

The depth distribution of deuterium in metal targets has been measured by sputtering the metal surface with a 60 keV Bi beam and monitoring the partial pressure of deuterium released into the target chamber with an MS 10 mass spectrometer. No significant differences were found for the distributions from D+, D 2 +, and D 3 + bombardments with 20 and 30 keV energy per incident atom.The sputtering coefficient, measured by the loss in weight of a target, was used to calculate ranges for the energy interval 5–80 keV. These are compared with previous experimental and theoretical values.