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September 1, 1973Journal of Applied Physics

Kinetics of the formation of hafnium silicides on silicon

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Authors

JZJ. F. ZieglerRobert Bosch (Taiwan)JMJ. W. MayerON Semiconductor (United States)CKC. J. KircherIBM Research - Thomas J. Watson Research Center

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Ziegler et al. (1973) studied this question.

synapsesocial.com/papers/6a71a0bf5d37378ac1debad4https://doi.org/10.1063/1.1662861
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  5. 5Growth Kinetics Observed in the Formation of Metal Silicides on Silicon1972 · 179 citations