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The availability of a fully functional LIGA-like processing sequence allows the construction of high aspect ratio metal structures. These structures can be used to produce assembled microelectromechanical (MEM) components. Testing of planar magnetic micromotors with gear boxes has been successfully completed. The results are encouraging enough to consider design of a MEM system: a dynamometer on a chip. Preliminary results prove that LIGA-like processing is compatible with silicon substrates which contain microelectronic components. Difficulties in magnetic winding construction have been overcome. Material issues which are primarily related to the magnetic behavior of electroplated films must be resolved to complete the study.
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Guckel et al. (1992) studied this question.
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