Integrated phased array for wide-angle beam steering

We demonstrate an on-chip optical phased array fabricated in a CMOS compatible process with continuous, fast (100 kHz), wide-angle (51°) beam-steering suitable for applications such as low-cost LIDAR systems. The device demonstrates the largest (51°) beam-steering and beam-spacing to date while providing the ability to steer continuously over the entire range. Continuous steering is enabled by a cascaded phase shifting architecture utilizing, low power and small footprint, thermo-optic phase shifters. We demonstrate these results in the telecom C-band, but the same design can easily be adjusted for any wavelength between 1.2 and 3.5 μm.