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A novel mechanical micropositioner has been developed for producing exact linear displacements in the nm range. Incorporated in a low temperature scanning tunneling microscope (STM), it is used as a coarse approach mechanism for the tunneling tip. The advantage of the design is the high accuracy of the linear motion and the absence of backlash. The design principle is discussed and its positioning accuracy and stability for STM imaging are demonstrated.
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Rust et al. (1997) studied this question.
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