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January 1, 1996Journal of Microelectromechanical Systems

Etch rates for micromachining processing

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Authors

KWK.R. WilliamsUniversity of GhanaRMR.S. MullerUniversity of California, Berkeley

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Williams et al. (1996) studied this question.

synapsesocial.com/papers/6a71e0bb5d37378ac1dee1cehttps://doi.org/10.1109/84.546406
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