Aligned island formation using an array of step bands and holes on Si(111)

We investigated the control of island formation using a patterned Si(111) surface with a periodic array of holes. During annealing, Au and Ga form islands at fixed locations on the array of step bands surrounding the holes. These materials or their silicides are in liquid phase at elevated temperatures. They diffuse along the step bands and accumulate at particular points on the periodic step bands. The size of the islands can be precisely designed by controlling the size of the pattern.