The characteristics of rf sputtered Pb0·92Bi0·07La0·01 (Fe0·405Nb0·325Zr0·27)O3 ferroelectric thin films have been investigated. Test structures were fabricated on gold-coated Al2O3 ceramic substrated with gold and platinum top electrodes. Typical characteristics obtained are: spontaneous polarization, 3-15 μC/cm2; coercivity, 5-10 kV/cm; Curie temperature, approximately 80°C; resistivity, approximately 1014 ohm-cm; switching speeds of 200-600 nsec. In life tests, films have been switched for greater than 1011 polarization reversals without appreciable degradation of polarization and coercivity.
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Spence et al. (1973) studied this question.
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