Fluorine‐containing photoreactive polyimide. II. Preparation and properties of self‐sensitized polyimide precursors

Two series of polyimide precursors that have benzophenone(BP) segments in addition to methacryloyl groups and perfluoromethyl groups in the main chain are described. These fluorinated polyimide precursors offered remarkable improvement in solubility in common organic solvents and self‐sensitivity at 365‐nm light ( i ‐line). It was also found that the sensitivity is extremely enhanced by the aid of a small amount of photoinitiators, and the effective initiators for sensitivity enhancement were different for each series of the precursors. These self‐sensitized polyimide precursors offered high resolution with good pattern profile of aspect ratio over 1.5. The temperatures for 10% weight loss of the imidized films were nearly 500°C from thermogravimetry analysis (TGA), indicating high thermal stability.