Large dynamic range, parallel detection system for electron diffraction and imaging

A parallel detection system for electrons in the 10–800-kV energy range is described. The design is based on a 576×382 pixel charge-coupled device array operating at liquid-nitrogen temperature. This is coupled by fiber optics to a single-crystal YAG screen, which serves as the primary detection element. The performance of the system for quantitative electron diffraction and imaging studies is described. The system will record a maximum count of 16 000 per pixel with low noise at a frame rate of 2.5 frames per second.