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September 1, 1968IBM Journal of Research and Development

On the Measurement of Impurity Atom Distributions in Silicon by the Differential Capacitance Technique

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Authors

DKDavid P. KennedyRAND CorporationPMP. C. MurleyIBM (United States)WKW. KleinfelderUnited States Military Academy

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Kennedy et al. (1968) studied this question.

synapsesocial.com/papers/6a72a7d5e5469ee92be28124https://doi.org/10.1147/rd.125.0399
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