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March 15, 1983Applied Physics Letters

Effect of gettering on leakage current in shallow junctions

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Authors

MGM. GhezzoGeneral Electric (United States)GGG. GildenblatArizona State UniversitySCShimon CohenTel Aviv University

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Ghezzo et al. (1983) studied this question.

synapsesocial.com/papers/6a745ade99bafac1af092ed3https://doi.org/10.1063/1.93989
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