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March 1, 1996Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Scanned probe microscope tip characterization without calibrated tip characterizers

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JVJohn S. VillarrubiaNational Institute of Standards and Technology

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John S. Villarrubia (1996) studied this question.

synapsesocial.com/papers/6a748038b35e02fb15032680 https://doi.org/10.1116/1.589130

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