Controlled photoluminescence in amorphous-silicon-nitride microcavities

Narrow-band and enhanced photoluminescence have been observed in hydrogenated amorphous-silicon-nitride microcavities. The distributed Bragg reflectors were fabricated using alternating layers of hydrogenated amorphous-silicon nitride and hydrogenated amorphous-silicon oxide. The microcavity resonance wavelength was designed to be at the maximum of the bulk hydrogenated amorphous-silicon-nitride luminescence spectrum. At the microcavity resonance, the photoluminescence amplitude is enhanced, while the photoluminescence linewidth is reduced with respect to the bulk hydrogenated amorphous-silicon nitride.