A buried-heterostructure laser has been developed whose output is deflected to a direction perpendicular to the substrate surface by a monolithically integrated 45° (parabolic) mirror. The latter is fabricated by smoothing a chemically etched multistep structure using a mass-transport phenomenon. The present devices show threshold current as low as 12 mA, differential quantum efficiency as high as 47% and a surface-emitting far-field pattern with a main lobe as narrow as 12°.
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Liau et al. (1985) studied this question.
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