Phase equilibria in metal-gallium-arsenic systems: Thermodynamic considerations for metallization materials

We propose a classification scheme for phase equilibria in elemental metal-gallium-arsenic systems. Using available data we assign as many metals as possible to seven generic types of ternary phase diagrams. We describe how the phase diagrams can provide a framework for interpreting previous studies of metal reactions with GaAs substrates and for identifying stable materials for GaAs metallizations.