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Fluoropolymer composite films with nanoporous morphology and dielectric constants less than 2.0, consisting of plasma‐polymerized allylpentafluorobenzene (pp‐APFB) nanospheres and magnetron sputter‐deposited poly(tetrafluoroethylene) (s‐PTFE) dense layers, have been prepared on hydrogen‐terminated Si(100) (H‐Si) substrates (see Figure).
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Fu et al. (2004) studied this question.
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